2019
Conference Paper
Title

Design and fabrication of single, smooth and broadband chirped mirrors with a top nano-porous layer

Abstract
The design and fabrication results of single, low-ripples and broadband chirped mirrors with an integrated nano-porous layer using two different processes, atomic layer deposition and plasma etching, will be presented.
Author(s)
Ma, P.
Szeghalmi, A.
Schulz, U.
Rickelt, F.
Beladiya, V.
Zimmermann, P.
Li, L.
Mainwork
Conference
DOI
Language
English