Simulating MEMS loudspeakers

The simulation of classic loudspeakers covers several physical domains, ranging from the electrical drive over the vibrating mechanics to the acoustic coupling. But what does it look like for MEMS loudspeakers? Their new drive mechanisms in combination with their comparatively small sizes lead to additional challenges. Here, we are going to take a closer look at the modeling of microacoustics, considering thermoviscous effects and meshing the geometry down to submicrometer sizes, in particular.