Integratable polymeric micropumps based on a diffusor-in-membrane configuration

For the transport of small amounts of fluids, various principles for micropumps have been presented during the last decades. The presented novel membrane actuator shows a less complex approach for low cost fluidic pumps suitable for integration in disposable devices or as stand-alone device. 'Heart' of the presented membrane actuator are integrated diffuser/nozzle structures, which in contrast to already presented valveless pumps are part of the deflected membrane itself. Design, working principle and fabrication in silicone are examined and presented with first results. At this stage performance of the novel micropump was evaluated using hybrid assemblies glued on commercial magnets, which showed an increase in pressure up to 400 Pa and a maximal flow rate of 5 ml/min without backpressure during operation. To eliminate the possibility of thermal effects the pressure sensor was mounted on the opposite side of the assembly showing a small decrease in pressure.