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Optical evaluation of the large signal behaviour of piezoelectric disc actuators to increase the precision of micro diaphragm pumps
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2021
Conference Paper
Title
Optical evaluation of the large signal behaviour of piezoelectric disc actuators to increase the precision of micro diaphragm pumps
Author(s)
Bußmann, Agnes
Korzer, Philipp
Wald, Christian
Mainwork
ACTUATOR 2021, 17th International Conference on New Actuators. CD-ROM
Project(s)
ADOS
Funder
VDI/VDE Technik GmbH
Conference
International Conference on New Actuators (ACTUATOR) 2021
International Exhibition on Smart Actuators and Drive Systems 2021
Language
English
Fraunhofer-Einrichtung für Mikrosysteme und Festkörper-Technologien EMFT
