2021

Konferenzbeitrag

Titel

Optical evaluation of the large signal behaviour of piezoelectric disc actuators to increase the precision of micro diaphragm pumps

Author(s)

Bußmann, Agnes

Korzer, Philipp

Wald, Christian

Hauptwerk

ACTUATOR 2021, 17th International Conference on New Actuators. CD-ROM

Project(s)

ADOS

Funder

VDI/VDE Technik GmbH

Konferenz

International Conference on New Actuators (ACTUATOR) 2021

International Exhibition on Smart Actuators and Drive Systems 2021