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Subnanometer calibration of diffractive micromirror arrays
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2018
Conference Paper
Title
Subnanometer calibration of diffractive micromirror arrays
Title Supplement
Abstract
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Author(s)
Sicker, Cornelius
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
Heber, Jörg
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
Berndt, Dirk
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
Mainwork
EOSAM 2018, European Optical Society Biennial Meeting. Proceedings
Conference
European Optical Society (EOSAM Biennial Meeting) 2018
File(s)
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Rights
Use according to copyright law
DOI
10.24406/h-403452
Language
English
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
Fraunhofer Group
Fraunhofer-Verbund Mikroelektronik
