Slow-wave coplanar strip line based Low-power 80-GHz voltage control oscillator on 22-nm FDSOI technology

This paper presents the design of a voltage controlled oscillator at mm-wave frequencies in the 22-nm Fully Depleted Silicon On Insulator technology from GlobalFoundries (22FDX). The low-quality factor inductance was replaced by a high-quality factor slow-wave transmission line. Including the output buffers, the oscillation frequency is centred at 80 GHz, with as a low-power consumption of 6.7 mW, an output power of -15.5 dBm and a phase noise of -104.7 dBc/Hz at 10 MHz offset.