2018
Poster
Title

Determination of compensation ratios of Al-implanted 4H-SiC by TCAD modelling of TLM measurements

Title Supplement
Poster presented at 12th European Conference on Silicon Carbide & Related Materials, September 2nd - 6th, 2018, Birmingham, UK
Author(s)
Kocher, Matthias  
Yao, Boteng
Weisse, Julietta
Rommel, Mathias  orcid-logo
Xu, Zongwei
Erlbacher, Tobias  
Bauer, Anton
Conference
DOI
File(s)
Rights
Under Copyright
Language
English