2018
Poster
Title

Decoration of Al implantation profiles in 4H-SiC by bevel grinding and dry oxidation

Title Supplement
Poster presented at 12th European Conference on Silicon Carbide & Related Materials, September 2nd - 6th, 2018, Birmingham, UK
Author(s)
Kocher, Matthias  
Erlbacher, Tobias  
Rommel, Mathias  orcid-logo
Bauer, Anton
Conference
File(s)
Rights
Use according to copyright law
DOI
Language
English