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2017
Konferenzbeitrag
Titel

Charge sensitive fluid sensor for chemical and biological applications

Abstract
A new field-effect transistor based transducer concept is presented, for measuring both, liquid and gaseous media. It uses a Faraday cup with a floating electrode inside, which is connected to the gate of a MOS like transistor. The SOI based technological realization allows a new degree of freedom for more flexible measurements as compared to conventional FET based transducers. Potentiometric measurements are presented. Additionally the SOI technology allows simple packaging.
Author(s)
Heigl, M.
Neumeier, K.
Spitzlsperger, G.
Kutter, C.
Eisele, I.
Hauptwerk
19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017
Konferenz
International Conference on Solid-State Sensors, Actuators, and Microsystems (TRANSDUCERS) 2017
Thumbnail Image
DOI
10.1109/TRANSDUCERS.2017.7994324
Language
Englisch
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