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  4. Strategies for rapid and reliable fabrication of microoptical structures using two-photon polymerization
 
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2017
Conference Paper
Title

Strategies for rapid and reliable fabrication of microoptical structures using two-photon polymerization

Author(s)
Steenhusen, Sönke  
Fraunhofer-Institut für Silicatforschung ISC  
Hasselmann, Sebastian  
Fraunhofer-Institut für Silicatforschung ISC  
Domann, Gerhard  
Fraunhofer-Institut für Silicatforschung ISC  
Mainwork
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics X  
Conference
Conference "Advanced Fabrication Technologies for Micro/Nano Optics and Photonics" 2017  
DOI
10.1117/12.2252913
Language
English
Fraunhofer-Institut für Silicatforschung ISC  
Keyword(s)

  • 3D-Druck

  • Additive Fertigung

  • Laserbearbeitung

  • Lithographie

  • Mikrooptik

  • Mikrolinsen

  • Polymere

  • Rasterelektronenmikroskopie (REM)

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