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Prospects and issues of nanomaterials use in microelectronics
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2016
Poster
Title
Prospects and issues of nanomaterials use in microelectronics
Title Supplement
Poster presented at Materials Research Society Spring Meeting 2016, Phoenix, Arizona, USA
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Author(s)
Jank, Michael
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB
Bauer, Anton
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB
Frey, Lothar
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB
Project(s)
NanoStreeM
Funder
European Commission EC
Conference
Materials Research Society (Spring Meeting) 2016
DOI
10.24406/publica-fhg-392562
File(s)
N-404768.pdf (1.56 MB)
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Rights
Under Copyright
Language
English
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB
Keyword(s)
nanomaterials
integrated circuit
processing
devices
nanodevices
assembly
