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2015
Conference Paper
Title

Semiconductor equipment assessment - an enabler for production ready equipment

Title Supplement
AEM - Advanced Equipment and Materials
Abstract
A detailed presentation of history, recent and current projects in the area of Semiconductor Equipment Assessment in Europe were presented. The topics and objectives of the ongoing equipment assessments within the SEA4KET framework were described. The importance on a horizontal and vertical collaboration in a global perspective was elaborated.
Author(s)
Pfeffer, M.  
Pfitzner, L.
Bauer, A.
Mainwork
26th Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2015. Proceedings  
Conference
Advanced Semiconductor Manufacturing Conference (ASMC) 2015  
DOI
10.1109/ASMC.2015.7164498
Language
English
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB  
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