2015
Poster
Title

Comparison of surface relief Bragg gratings fabricated by UV-SCIL and volume index Bragg gratings based on hybrid polymers

Title Supplement
Poster presented at MNE 2015, 41st International Conference on Micro and Nano Engineering, The Hague, The Netherlands, 21-24 September 2015
Author(s)
Förthner, Michael
Chair of Electron Devices
Rumler, Maximilian
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB  
Michel, Felix
Chair of Electron Devices
Rommel, Mathias  orcid-logo
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB  
Frey, Lothar
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB  
Girschikofsky, Maiko
University of Applied Science Aschaffenburg
Belle, Stefan
University of Applied Science Aschaffenburg
Hellmann, Ralf
University of Applied Science Aschaffenburg
Klein, Jan Jasper
micro resist technologies
Funder
Conference
File(s)
Rights
Use according to copyright law
DOI
Language
English
Keyword(s)