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  4. Optical polymers with tunable refractive index for nanoimprint technologies
 
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2014
Poster
Title

Optical polymers with tunable refractive index for nanoimprint technologies

Title Supplement
Poster presented at NNT 2014, 13th International Conference on Nanoimprint & Nanoprint Technology, Kyoto, Japan, October 22-24, 2014
Author(s)
Fader, Robert
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB  
Landwehr, Johannes
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB  
Rumler, Maximilian
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB  
Rommel, Mathias  orcid-logo
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB  
Bauer, A.J.
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB  
Frey, Lothar
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB  
Simon, B.
Research Institute for Technical Physics and Materials Science, Budapest
Fodor, B.
Research Institute for Technical Physics and Materials Science, Budapest
Petrik, Peter
Research Institute for Technical Physics and Materials Science, Budapest
Schiener, A.
Center for Nanoanalysis and Electron Microscopy (CENEM), University of Erlangen-Nuremberg
Winter, Benjamin
Center for Nanoanalysis and Electron Microscopy (CENEM), University of Erlangen-Nuremberg
Spiecker, Erdmann
Center for Nanoanalysis and Electron Microscopy (CENEM), University of Erlangen-Nuremberg
Conference
International Conference on Nanoimprint and Nanoprint Technology (NNT) 2014  
DOI
10.24406/publica-fhg-387005
File(s)
Download (2.37 MB)
Rights
Under Copyright
Language
English
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB  
Keyword(s)
  • nanoimprint

  • SCIL

  • high index resist

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