Deeper insight with MEMS based illumination
Paper presented at Europen Optical Society Annual Meeting, EOSAM 2014, Berlin, 15 September - 19 September 2014
Integrating MEMS in an optical beam line allows the precise steering and structuring of light. We present diffractive micro-mirror arrays for enhanced illumination in a microscope setup. The illumination pattern, the beam angle, the intensity, and the pulse duration can be modulated continuously and independently in the kHz range. This new modulator prepares striking enhancements in fluorescence microscopy.