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  4. Large area fabrication of plasmonic color filters using UV-SCIL
 
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2014
Presentation
Title

Large area fabrication of plasmonic color filters using UV-SCIL

Title Supplement
Presentation held at MNE 2014, 40th International Conference on Micro and Nano Engineering, Lausanne, Switzerland, September 22-26, 2014
Other Title
Großflächige Herstellung plasmonischer Farbfilter mittels UV-SCIL
Author(s)
Rumler, Maximilian
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB  
Fader, R.
Förthner, M.
Haas, A.  
Rommel, Mathias  orcid-logo
Bauer, A.J.
Frey, L.
Conference
International Conference on Micro and Nano Engineering (MNE) 2014  
DOI
10.24406/publica-fhg-385261
File(s)
N-310484.pdf (1.59 MB)
Rights
Under Copyright
Language
English
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB  
Keyword(s)
  • Nanoimprint

  • Farbfilter

  • Plasmonik

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