2013
Presentation
Title

Life time of flexible PDMS stamps for UV-enhanced substrate conformal imprint lithography (SCIL)

Title Supplement
Presentation held at 39th International Conference on Micro and Nano Engineering, 16.-19.09.2013, London
Author(s)
Fader, Robert
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB  
Rumler, M.
Rommel, Mathias  orcid-logo
Bauer, A.J.
Frey, L.
Brehm, M.
Kraft, A.
Reboud, V.
Landis, S.
Conference
File(s)
Rights
Use according to copyright law
DOI
Language
English