2011
Poster
Title

UV-enhanced substrate conformal imprint lithography using an epoxy based polymer

Title Supplement
Poster at NNT 2011, 10th International Conference on Nanoimprint and Nanoprint Technology, 19.10.-21.10.2011, The Shilla Jeju, Korea
Author(s)
Fader, R.
Schmitt, H.
Rommel, Mathias  orcid-logo
Bauer, A.J.
Frey, L.
Ji, R.
Hornung, M.
Brehm, M.
Kraft, A.
Conference
File(s)
Rights
Use according to copyright law
DOI
Language
English
Keyword(s)