2011
Poster
Title

Novel polymers for UV-enhanced substrate conformal imprint lithography

Title Supplement
Poster at MNE 2011, 37th International Conference on Micro&Nano Engineering 2011, 19.09.-23.09.2011, Berlin, Germany
Author(s)
Fader, R.
Schmitt, H.
Rommel, Mathias  orcid-logo
Bauer, A.J.
Frey, L.
Ji, R.
Hornung, M.
Brehm, M.
Vogler, M.
Conference
File(s)
Rights
Use according to copyright law
DOI
Language
English
Keyword(s)