2011
Poster
Title

Life time evaluation of PDMS stamps for UV-enhanced substrate conformal imprint lithography

Title Supplement
Poster at MNE 2011, 37th International Conference on Micro&Nano Engineering 2011, 19.09.-23.09.2011, Berlin, Germany
Author(s)
Schmitt, H.
Duempelmann, P.
Fader, R.
Rommel, Mathias  orcid-logo
Bauer, A.J.
Frey, L.
Brehm, M.
Kraft, A.
Conference
DOI
File(s)
Rights
Under Copyright
Language
English
Keyword(s)