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  4. Progress in laboratory based X-ray microscopy
 
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2011
Conference Paper
Title

Progress in laboratory based X-ray microscopy

Abstract
In recent years X-ray tomography has made progressive steps towards spatial resolution in the sub-micron range. A limiting factor is the finite focal spot size of state-of-the-art microfocus tubes. In this contribution we present a radiography setup with an X-ray source capable of generation focal spot sizes down to 80 nm, thanks to special targets designed using Monte Carlo simulations. Together with a high geometric magnification and a low-noise photon-counting detector this makes the setup ideal for material characterisation at the nanoscale.
Author(s)
Ebensperger, T.
Nachtrab, F.
Sukowski, F.
Hanke, R.
Mainwork
24th International Vacuum Nanoelectronics Conference, IVNC 2011. Technical digest  
Conference
International Vacuum Nanoelectronics Conference (IVNC) 2011  
Language
English
Fraunhofer-Institut für Integrierte Schaltungen IIS  
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