2010
Conference Paper
Title

Extraordinary low transmission of a metamaterial for application in lithography

Abstract
We present experiments on a metamaterial made from an ultrathin (< 40 nm) metal film. It exhibits extraordinary low transmission due to an antenna resonance and may form building blocks of future lithographic masks.
Author(s)
Dobmann, S.
Ploss, D.
Reibold, D.
Erdmann, A.  
Peschel, U.
Mainwork
Conference
Language
English