Hybride Modellierung und simulationsgestützte Optimierung in der Planung von Produktionsprozessen

The discrete event simulation is well established in the planning of production processes. However, an information deficite arises when sub-processes are executed according to complex recipes. For the mathematical modelling of these recipes often differential-algebraic equations (DAEs) can be used. Using the example of chemical mechanical polishing (CMP) of the semiconductor manufacturing, the integration of DAEs in the process simulation is demonstrated. Moreover, the aging of materials and the consumption of consumables are included in the modelling. A compromise of wafer yield and consumables consumption is determined by means of Pareto-optimization.