2010
Conference Paper
Title

Nanoscale coatings

Abstract
Further progress on the manufacture of nanoscale coatings requires control of film-microstructure at the atomic level. Latest results from coatings for EUV- and DUV-lithography, coatings and nanostructures on plastics and balanced-properties coatings will be presented.
Author(s)
Kaiser, N.
Bischoff, M.
Feigl, T.
Schulz, U.
Stenzel, O.
Mainwork
Conference
Language
English