Microplasmas for functionalization of surfaces inside small capillaries

Functionalization of small and narrow tubings with plasma is a challenge. It is pos-sible with so-called microplasmas which are in the dimension of several mm. Functionaliza-tion with amino-groups is shown exemplary. Therefore experiments were carried with differ-ent mixtures of He and NH3 or He and N2+H2. The optical emission properties of these mix-tures were compared.