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Modeling and simulation atomistic process simulation and memory modeling
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2008
Conference Paper
Title
Modeling and simulation atomistic process simulation and memory modeling
Author(s)
Sonoda, K.
Pichler, P.
Mainwork
IEEE International Electron Devices Meeting, IEDM 2008. Technical Digest
Conference
International Electron Devices Meeting (IEDM) 2008
DOI
10.1109/IEDM.2008.4796743
Language
English
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB
