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Micro machining technologies for non silicon materials
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2008
Conference Paper
Title
Micro machining technologies for non silicon materials
Author(s)
Baum, M.
Rota, A.
Salk, N.
Otto, T.
Gessner, T.
Mainwork
Smart systems integration 2008
Conference
European Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components 2008
Language
English
Fraunhofer-Institut für Elektronische Nanosysteme ENAS
Fraunhofer-Institut für Fertigungstechnik und Angewandte Materialforschung IFAM
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM
