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Front-end junction and contact formation in future silicon/germanium based devices. Preface
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2008
Conference Paper
Title
Front-end junction and contact formation in future silicon/germanium based devices. Preface
Author(s)
Cristianoa, F.
Lauwers, A.
Pichler, P.
Feudel, T.
Windil, W.
Mainwork
Front-end junction and contact formation in future silicon/germanium based devices
Conference
Symposium "Front-End Junction and Contact Formation in Future Silicon/Germanium based Devices" 2008
DOI
10.1016/j.mseb.2008.10.022
Language
English
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB
