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Investigation of high-resolution contact printing
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2008
Conference Paper
Title
Investigation of high-resolution contact printing
Author(s)
Meliorisz, B.
Partel, S.
Schnattinger, T.
Fühner, T.
Erdmann, A.
Hudek, P.
Mainwork
33rd International Conference on Micro- and Nano-Engineering 2007. Proceedings
Conference
International Conference on Micro- and Nano-Engineering (MNE) 2007
DOI
10.1016/j.mee.2007.12.012
Language
English
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB
