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Impact of alternative mask stacks on the imaging performance at NA 1.20 and above
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2007
Conference Paper
Titel
Impact of alternative mask stacks on the imaging performance at NA 1.20 and above
Author(s)
Philipsen, V.
Mesuda, K.
Bisschop, P. de
Erdmann, A.
Citarella, G.
Evanschitzky, P.
Birkner, R.
Richter, R.
ScherĂ¼bl, T.
Hauptwerk
Photomask Technology 2007. Pt.1
Konferenz
Symposium on Photomask Technology 2007
International Symposium on Photomask Technology 2007
DOI
10.1117/12.746678
Language
English
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Fraunhofer-Institut fĂ¼r Integrierte Systeme und Bauelementetechnologie IISB