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Simulation of larger mask areas using the waveguide method with fast decomposition technique
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2007
Conference Paper
Title
Simulation of larger mask areas using the waveguide method with fast decomposition technique
Author(s)
Evanschitzky, P.
Shao, F.
Erdmann, A.
Reibold, D.
Mainwork
Photomask Technology 2007. Pt.1
Conference
Symposium on Photomask Technology 2007
International Symposium on Photomask Technology 2007
DOI
10.1117/12.746631
Language
English
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB
