English
Deutsch
Log In
Log in with Fraunhofer Smartcard
Password Login
Research Outputs
Fundings & Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Konferenzschrift
Simulation of larger mask areas using the waveguide method with fast decomposition technique
Details
Full
Export
Statistics
Options
Show all metadata (technical view)
2007
Conference Paper
Title
Simulation of larger mask areas using the waveguide method with fast decomposition technique
Author(s)
Evanschitzky, P.
Shao, F.
Erdmann, A.
Reibold, D.
Mainwork
Photomask Technology 2007. Pt.1
Conference
Symposium on Photomask Technology 2007
International Symposium on Photomask Technology 2007
DOI
10.1117/12.746631
Language
English
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB
