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  4. Simulation of larger mask areas using the waveguide method with fast decomposition technique
 
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2007
  • Konferenzbeitrag

Titel

Simulation of larger mask areas using the waveguide method with fast decomposition technique

Author(s)
Evanschitzky, P.
Shao, F.
Erdmann, A.
Reibold, D.
Hauptwerk
Photomask Technology 2007. Pt.1
Konferenz
Symposium on Photomask Technology 2007
International Symposium on Photomask Technology 2007
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DOI
10.1117/12.746631
Language
Englisch
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