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Simulation of larger mask areas using the waveguide method with fast decomposition technique
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2007
Konferenzbeitrag
Titel
Simulation of larger mask areas using the waveguide method with fast decomposition technique
Author(s)
Evanschitzky, P.
Shao, F.
Erdmann, A.
Reibold, D.
Hauptwerk
Photomask Technology 2007. Pt.1
Konferenz
Symposium on Photomask Technology 2007
International Symposium on Photomask Technology 2007
DOI
10.1117/12.746631
Language
Englisch
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