2007
Conference Paper
Title

Femtosecond laser nanomachining of silicon wafers and two-photon nanolithography for stem cell research

Author(s)
König, K.
Bauerfeld, F.
Sauer, D.
Schuck, H.  
Uchugonova, A.
Lei, E.
Stark, M.
Velten, T.  orcid-logo
Bückle, R.
Harzic, R. le
Mainwork
Conference
Language
English