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Bending of aluminum alloy beams depending on irradiance and repetition rate of UV laser radiation
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2006
Konferenzbeitrag
Titel
Bending of aluminum alloy beams depending on irradiance and repetition rate of UV laser radiation
Author(s)
Krellmann, M.
Friedrichs, M.
Dauderstädt, U.
Wagner, M.
Lakner, H.
Hauptwerk
Reliability, packaging, testing, and characterization of MEMS/MOEMS V
Konferenz
Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS 2006
DOI
10.1117/12.647358
Language
Englisch
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