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RF-plasma treatment on the inside of small functional devices for biomedical application
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2005
Conference Paper
Title
RF-plasma treatment on the inside of small functional devices for biomedical application
Author(s)
Oehr, C.
Hegemann, D.
Müller, Michael
Vohrer, Uwe
Storr, M.
Mainwork
Plasma processes and polymers
Conference
International Symposium on Plasma Chemistry (ISPC) 2003
DOI
10.1002/3527605584.ch23
Language
English
Fraunhofer-Institut für Grenzflächen- und Bioverfahrenstechnik IGB
