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RF-plasma deposition of SiOx and a-C:H as barrier coatings on polymers
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2005
Conference Paper
Title
RF-plasma deposition of SiOx and a-C:H as barrier coatings on polymers
Author(s)
Hegemann, D.
Schütz, U.
Oehr, C.
Mainwork
Plasma processes and polymers
Conference
International Symposium on Plasma Chemistry (ISPC) 2003
DOI
10.1002/3527605584.ch2
Language
English
Fraunhofer-Institut für Grenzflächen- und Bioverfahrenstechnik IGB
