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Ultrathin carbon-fluorine films
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2005
Conference Paper
Title
Ultrathin carbon-fluorine films
Author(s)
Barz, J.
Haupt, Michael
Hilgers, H.
Oehr, C.
Mainwork
27th International Conference on Phenomena in Ionised Gases, XXVII ICPIG 2005. Proceedings. CD-ROM
Conference
International Conference on Phenomena in Ionized Gases (ICPIG) 2005
Language
English
Fraunhofer-Institut für Grenzflächen- und Bioverfahrenstechnik IGB
