2005
Conference Paper
Title

MOCVD of cunductive cubic HfN thin films from Hf(NR2)4 and N,N-dimethylhydrazine

Author(s)
Kim, Y.
Parala, H.
Bauer, A.J.
Lemberger, M.
Baunemann, A.
Fischer, R.A.
Mainwork
Conference
Language
English