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Surface-micromachined capacitive RF switches with high thermal stability and low drift using Ni as structural material
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2004
Conference Paper
Title
Surface-micromachined capacitive RF switches with high thermal stability and low drift using Ni as structural material
Author(s)
Lisec, T.
Huth, C.
Shakhray, M.
Wagner, B.
Combi, C.
Mainwork
MEMSWAVE 2004, 5th Workshop on MEMS for MillimeterWAVE Communications
Conference
Workshop on MEMS for MillimeterWAVE Communications (MEMSWAVE) 2004
Language
English
Fraunhofer-Institut für Siliziumtechnologie ISIT
