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2004
Conference Paper
Title
Preface to the special issue on the EMRS 2004 Symposium B on "Material Science Issues in Advanced CMOS Source-drain Engineering"
Other Title
Vorwort zu der Sonderausgabe über das EMRS 2004 Sympsium B zu "Materialwissenschaftliche Fragestellungen zu fortschrittlichen Technologien von Source/Drain-Gebieten in CMOS Transistoren"
Abstract
The text is a preface to a special issue of Materials Science and Engineering B containing selected papers presented at symposium B "Material science issues in advanced CMOS source-drain engineering" of the E-MRS Spring Meeting held in Stra sbourg from May 24 to 28, 2004.
