Screen printed selective emitters prepared by fast and rapid thermal diffusion

A thorough analysis of emitter formation by screen printed phosphorus dopant pastes is presented. For the diffusion short processes ranging from 2 up to 10 minutes plateau time have been investigated using an RTP reactor and a conveyor belt furnace respectively. Using samples for lifetime and dopant profile measurement processes for selective emitter formation are selected. Solar cells have been processed for the most promising process schemes.