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Reliability of polysilicon under long-term cyclic loading
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2002
Conference Paper
Title
Reliability of polysilicon under long-term cyclic loading
Author(s)
Bagdahn, J.
Fraunhofer-Institut für Werkstoffmechanik IWM
Sharpe, W.N.
Mainwork
MEMS 2002. The 15th IEEE International Conference on Micro Electro Mechanical Systems. Technical digest
Conference
International Conference on Micro Electro Mechanical Systems (MEMS) 2002
DOI
10.1109/MEMSYS.2002.984299
Language
English
Fraunhofer-Institut für Werkstoffmechanik IWM
