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  4. Reliability of polysilicon under long-term cyclic loading
 
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2002
Conference Paper
Title

Reliability of polysilicon under long-term cyclic loading

Author(s)
Bagdahn, J.
Fraunhofer-Institut für Werkstoffmechanik IWM  
Sharpe, W.N.
Mainwork
MEMS 2002. The 15th IEEE International Conference on Micro Electro Mechanical Systems. Technical digest  
Conference
International Conference on Micro Electro Mechanical Systems (MEMS) 2002  
DOI
10.1109/MEMSYS.2002.984299
Language
English
Fraunhofer-Institut für Werkstoffmechanik IWM  
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