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Ferroelectric thin films on metallic substrates as sensor elements: preparation and piezoelectric properties
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1999
Conference Paper
Title
Ferroelectric thin films on metallic substrates as sensor elements: preparation and piezoelectric properties
Author(s)
Seifert, S.
Giersbach, M.
Hauke, T.
Löbmann, P.
Sporn, D.
Beige, H.
Mainwork
Sensor '99. Proceedings. Vol.1
Conference
Sensor 1999
Language
English
Fraunhofer-Institut für Silicatforschung ISC