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Three-dimensional simulation of low-pressure chemical vapour deposition
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1996
Conference Paper
Title
Three-dimensional simulation of low-pressure chemical vapour deposition
Author(s)
Bär, E.
Lorenz, J.
Ryssel, H.
Mainwork
Software for electrical engineering analysis and design
Conference
International Conference on Software for Electrical Engineering Analysis and Design 1996
Electrosoft 1996
Language
English
IIS-B
