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Analytical model for phosphorus large angle tilted implantation
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1995
Conference Paper
Title
Analytical model for phosphorus large angle tilted implantation
Author(s)
Burenkov, A.
Fraunhofer-Institut für Integrierte Schaltungen IIS
Bohmayr, W.
Lorenz, J.
Ryssel, H.
Selberherr, S.
Mainwork
6th International Conference on Simulation of Semiconductor Devices and Processes. SISDEP '95. Proceedings
Conference
International Conference on Simulation of Semiconductor Devices and Processes (SISDEP) 1995
Language
English
IIS-B
