English
Deutsch
Log In
Password Login
or
Log in with Fraunhofer Smartcard
Research Outputs
Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Konferenzschrift
Analytical model for phosphorus large angle tilted implantation
Details
Full
Export
Statistics
Options
1995
Conference Paper
Titel
Analytical model for phosphorus large angle tilted implantation
Author(s)
Burenkov, A.
Fraunhofer-Institut für Integrierte Schaltungen IIS
Bohmayr, W.
Lorenz, J.
Ryssel, H.
Selberherr, S.
Hauptwerk
6th International Conference on Simulation of Semiconductor Devices and Processes. SISDEP '95. Proceedings
Konferenz
International Conference on Simulation of Semiconductor Devices and Processes (SISDEP) 1995
Language
English
google-scholar
View Details
IIS-B