English
Deutsch
Log In
Log in with Fraunhofer Smartcard
Password Login
Research Outputs
Fundings & Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Konferenzschrift
3D simulation of topography and doping processes at FhG
Details
Full
Export
Statistics
Options
Show all metadata (technical view)
1995
Conference Paper
Title
3D simulation of topography and doping processes at FhG
Author(s)
Lorenz, J.
Bär, E.
Burenkov, A.
Fraunhofer-Institut für Integrierte Schaltungen IIS
Henke, W.
Tietzel, K.
Weiß, M.
Mainwork
6th International Conference on Simulation of Semiconductor Devices and Processes. SISDEP '95. Proceedings
Conference
International Conference on Simulation of Semiconductor Devices and Processes (SISDEP) 1995
Language
English
IIS-B
