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3D simulation of topography and doping processes at FhG
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1995
Conference Paper
Title
3D simulation of topography and doping processes at FhG
Author(s)
Lorenz, J.
Bär, E.
Burenkov, A.
Fraunhofer-Institut für Integrierte Schaltungen IIS
Henke, W.
Tietzel, K.
Weiß, M.
Mainwork
6th International Conference on Simulation of Semiconductor Devices and Processes. SISDEP '95. Proceedings
Conference
International Conference on Simulation of Semiconductor Devices and Processes (SISDEP) 1995
Language
English
IIS-B
