English
Deutsch
Log In
Email address
Password
Log in
or
Log in with Shibboleth
Research Outputs
Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Konferenzschrift
High-rate sputtering with a torus plasmatron
Details
Full
Export
Statistics
Options
1976
Conference Paper
Titel
High-rate sputtering with a torus plasmatron
Alternative
Hochrate-Zerstäuben mit dem Torus-Plasmatron VI
Author(s)
Heisig, U.
Goedicke, K.
Schiller, S.
Hauptwerk
Symposium on Electron and Ion Beam Science and Technology 1976. Proceedings
Konferenz
Symposium on Electron and Ion Beam Science and Technology 1976
Language
English
google-scholar
View Details
Fraunhofer-Institut für Organische Elektronik, Elektronenstrahl- und Plasmatechnik FEP
