Patent
Title

Tiegel zur Aufnahme eines Werkstoffs, der mit einem CVD- oder PVD-Verfahren verdampft werden soll

Other Title
Crucible for holding a material to be evaporated using a CVD or PVD method
Abstract
The crucible has housing element (2) that is mounted on a base plate (1) and formed with an internal hollow structure. A sealing element (3) is provided between front end of the housing element and base plate. The holding devices (4,5) are arranged in opposite end faces of the housing element to exert a compressive force on the base plate.
Inventor(s)
Zimmer, O.
Schenk, S.
Link to Espacenet
Patent Number
102010052143
Publication Date
2010
Language
German