Tiegel zur Aufnahme eines Werkstoffs, der mit einem CVD- oder PVD-Verfahren verdampft werden soll
Date Issued
2010
Author(s)
Zimmer, O.
Schenk, S.
Patent No
102010052143
Abstract
The crucible has housing element (2) that is mounted on a base plate (1) and formed with an internal hollow structure. A sealing element (3) is provided between front end of the housing element and base plate. The holding devices (4,5) are arranged in opposite end faces of the housing element to exert a compressive force on the base plate.