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Patent
Title
Verfahren und Vorrichtung zur Plasmamodifizierung von flaechigen poroesen Gegenstaenden
Other Title
Process and device for the plasma modification of flat porous objects
Abstract
The invention relates to a process for the modificaiton of flat objects using low-pressure plasma, characterized by the fact that a differential pressure is applied to the reaction chamber between the process gas inlet and the plasma outlet in such a way that the plasma is guided through the flat object.
Inventor(s)
Patent Number
1994-4426229
1994-4432919
Publication Date
2001
Language
German