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2021
Master Thesis
Titel
Acquisition Time Reduction in Large-Area, High-Resolution Scanning Electron Microscopy-Analysis of Nanometer Integrated Circuits Through Deep Learning-Based Super Resolution
ThesisNote
Karlsruhe, Inst. für Technologie (KIT), Master Thesis, 2021
Beteiligt
Gengenbach, Ulrich
Institute for Automation and Applied Informatics, Karlsruhe Institute of Technology, Karlsruhe, Germany
Verlagsort
Karlsruhe