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  4. One-step transfer printing of patterned nanogap electrodes
 
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2019
Zeitschriftenaufsatz
Titel

One-step transfer printing of patterned nanogap electrodes

Abstract
Direct printing of nanogap-separated metallic contact pairs is described that enables novel nanoelectronic device architectures. Nanotransfer printing (nTP) stamps are grown by molecular beam epitaxy involving layered III-V semiconductors that are selectively etched. Finished stamps comprise both the nanoscale surface trench that becomes the nanogap on printing and a microscale, predetermined geometry that affords the simultaneous integration of contact pads for external electrical testing. This nTP technique is well suited for top-contacting sensitive thin films for electrical characterization; a typical electrode configuration is illustrated by transfer-printed 13 nm thin metal films that are separated by an electrically insulating gap of ca. 30 nm.
Author(s)
Saller, K.B.
Riedl, H.
Lugli, P.
Koblmüller, G.
Tornow, M.
Zeitschrift
Journal of vacuum science and technology B. Microelectronics and nanometer structures
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DOI
10.1116/1.5100560
Language
Englisch
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